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CCD图像传感器电极间漏电流自动化测试系统设计
引用本文:郭利,周建勇,何达,何昌海,尹俊,唐遵烈,袁世顺. CCD图像传感器电极间漏电流自动化测试系统设计[J]. 半导体光电, 2020, 41(2): 287-290
作者姓名:郭利  周建勇  何达  何昌海  尹俊  唐遵烈  袁世顺
作者单位:重庆光电技术研究所, 重庆 400060
摘    要:CCD图像传感器电极间漏电流是反映CCD器件可靠性的一个关键参数,在CCD图像传感器的生产过程中,对其电极间漏电流测试是一个重要的检测筛选环节。基于一种漏电流自动化测试方法,设计了一种CCD电极间漏电流自动化测试系统。该系统可根据不同种类CCD器件,自定义被测信号名称、测试通道地址和测试判据,通过计算机软件控制自动循环扫描,自动采集漏电电流数据,形成标准测试报表。该系统具有设置灵活、操作方便、自动化测试等优点,可有效提升CCD生产检查筛选过程中的测试效率和测试设备的通用性。

关 键 词:CCD图像传感器  电极间漏电流  自动化测试
收稿时间:2019-12-05

Design of Automated Test System for Leakage Current between Electrodes of CCD Image Sensor
GUO Li,ZHOU Jianyong,HE D,HE Changhai,YIN Jun,TANG Zunlie,YUAN Shishun. Design of Automated Test System for Leakage Current between Electrodes of CCD Image Sensor[J]. Semiconductor Optoelectronics, 2020, 41(2): 287-290
Authors:GUO Li  ZHOU Jianyong  HE D  HE Changhai  YIN Jun  TANG Zunlie  YUAN Shishun
Affiliation:Chongqing Optoelectronics Research Institute, Chongqing 400060, CHN
Abstract:Leakage current between electrodes of charge coupled device (CCD) image sensors is a key parameter affecting the reliability of CCD, thus the measurement of leakage current is very important for the detection and screening in the production process of CCD image sensors. In this paper, based on an automatic test method of leakage current, an automated test system for leakage current between CCD electrodes is designed. The signal name, test channel address and the test criterion can be customized according to different types of CCDs, and automated cycle scanning operations are controlled by computer software to collect leakage current data to form a standard test report automatically. This automated test system presents the advantages of flexible setting, convenient operation and automated testing, which can effectively improve the testing efficiency and equipment versatility in the production and screening processes of CCDs.
Keywords:CCD image sensor   leakage current between electrodes   automated test
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