| 压电谐振器特殊模态振动特性研究 |
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| 引用本文： | 梁天晨,吴校生,李志超.压电谐振器特殊模态振动特性研究[J].半导体光电,2020,41(2):195-199. |
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| 作者姓名： | 梁天晨 吴校生 李志超 |
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| 作者单位： | 上海交通大学 微纳电子学系 微米纳米加工技术国家重点实验室, 上海 200240 |
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| 基金项目： | 上海市科委平台建设项目(11DZ2290303)；上海市科委浦江人才计划资助项目(14PJD022). |
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| 摘 要： | 针对压电谐振器振动特性分析的应用需求,构建了一种小型化、廉价的矢量分析系统。系统采用STM32控制4路DDS芯片产生驱动信号和矢量解析正交信号。通过向DDS芯片写频率控制字,对压电谐振器进行扫频驱动。同时采用STM32内置ADC,采样并计算获取各频率点压电谐振器输出信号的幅值和相位。通过提取压电谐振器两个特殊振动模态下的共振频率、品质因数(Q值)、输出信号相位等振动特性参数,获得驱动信号对这些参数的影响规律,系统分析了驱动信号对压电谐振器振动特性的影响,为压电谐振器的驱动、信号检测提供了有效的技术途径,实验结果为压电谐振器振动特性分析提供了依据。
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| 关 键 词： | 压电谐振器 振动模态 品质因数 谐振频率 矢量解析 |
| 收稿时间： | 2019/12/13 0:00:00 |
Research on Special Modal Vibration Characteristics of Piezoelectric Resonators |
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| LIANG Tianchen,WU Xiaosheng,LI Zhichao.Research on Special Modal Vibration Characteristics of Piezoelectric Resonators[J].Semiconductor Optoelectronics,2020,41(2):195-199. |
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| Authors: | LIANG Tianchen WU Xiaosheng LI Zhichao |
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| Affiliation: | National Key Laboratory of Science and Technology on Micro/Nano Fabrication Laboratory, Department of Micro/Nano Electronics, Shanghai Jiaotong University, Shanghai 200240, CHN |
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| Abstract: | A miniaturized and low-cost vector analysis system is proposed to analyze the vibration characteristics of piezoelectric resonators. The system uses STM32 to control 4 DDS chips to generate the driving signals and the vector analytical orthogonal signals. By writing frequency control words to the DDS module, the signals with sweeping frequencies are generated to excite the piezoelectric resonator. Vector analytical technology is used to obtain the amplitude and phase of the output at each sweeping frequency. The resonance frequency, quality factor (Q value) and phase parameters under the two special vibration modes of the piezoelectric resonator are extracted. The influence of driving signals on vibration characteristics of piezoelectric resonator are analyzed systematically. |
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| Keywords: | piezoelectric resonator vibration mode quality factor resonance frequency vector analysis |
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