| 微型压电超声马达定子表面振动特性分析 |
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| 引用本文： | 张健 沈德新. 微型压电超声马达定子表面振动特性分析[J]. 压电与声光, 1998, 20(1): 64-67,58 |
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| 作者姓名： | 张健 沈德新 |
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| 作者单位： | 中国科学院上海冶金研究所传感技术国家重点实验室 |
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| 基金项目： | 国家科委攀登计划B“微电子机械系统”资助 |
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| 摘 要： | 微型压电超声马达定子表面的振动幅度是难以检测的动态微小量。定子振动状态将直接关系到压电马达的实现与否。首镒分析了采用均分电极结构的微型压电超声行波马达的定子表面的振动振幅。通过影响定子振幅相关因素的分析，表明要获得最佳表面振动效果，压电薄膜与弹性体的厚度必须相匹配。
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| 关 键 词： | 微型 压电超声马达 定子 振动振幅 匹配 |
Analyzing the Vibrational Properties of Stator Surface in Piezoelectric Ultrasonic Micromotors |
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| Zhang Jian Shen Dexin Lu Jianguo Wang Weiyuan. Analyzing the Vibrational Properties of Stator Surface in Piezoelectric Ultrasonic Micromotors[J]. Piezoelectrics & Acoustooptics, 1998, 20(1): 64-67,58 |
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| Authors: | Zhang Jian Shen Dexin Lu Jianguo Wang Weiyuan |
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| Abstract: | The vibrational amplitude in the piezoelectric ultrasonic micromotors is too small to detect. The vibrational properties of stator surface play a very important role on the realization of the micromotor. In this paper, the vibrational amplitude of stator surfacce, which employing the equally divided electrode configuration, were analyzed and the relevant factors were discussed also. The modeling results had shown that in order to obtain the optimum or maximum vibrational effect, the thicknesses between the piezoelectric films and the elastic body must match. |
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| Keywords: | piezoelectric ultrasonic micromotors stator rotor vibrational amplitude match |
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