| 热水解法制备Fe2O3纳米粒子及其在Si表面的分散 |
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| 引用本文： | 周宏梁,申自勇,侯士敏,赵兴钰,薛增泉.热水解法制备Fe2O3纳米粒子及其在Si表面的分散[J].真空科学与技术学报,2003,23(5):315-318. |
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| 作者姓名： | 周宏梁 申自勇 侯士敏 赵兴钰 薛增泉 |
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| 作者单位： | 北京大学电子学系,北京,100871 |
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| 基金项目： | 国家自然科学基金No.50202001,69902002,60231010，国家重点基础研究资助项目(No.2001CB610503) |
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| 摘 要： | 用快速热水解的方法,制备直径小于10 nm的单分散Fe(OH)3胶体粒子。X射线衍射(XRD)和透射电镜(TEM)衍射分析表明:Fe(OH)3胶体粒子脱水后转变为Fe2O3纳米粒子。用离心分散的方法,胶体粒子在干燥过程中避免了团聚现象,实现其在Si表面的单层均匀分散覆盖。研究了胶体溶液浓度对胶体粒子尺寸及表面覆盖度的影响:改变胶体溶液的浓度,可以调节胶体粒子在Si表面的覆盖度,但对胶体粒子尺寸的影响不明显。
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| 关 键 词： | 水解 纳米粒子 离心分散 |
| 文章编号： | 0253-9748(2003)05-0315-04 |
| 修稿时间： | 2003年4月16日 |
Synthesis of Nanoparticles with Thermal Hydrolyzationand Its Dispersion on Si Surface |
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| Zhou Hongliang,Shen Ziyong,Hou Shimin,Zhao Xingyu and Xue Zengquan.Synthesis of Nanoparticles with Thermal Hydrolyzationand Its Dispersion on Si Surface[J].JOurnal of Vacuum Science and Technology,2003,23(5):315-318. |
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| Authors: | Zhou Hongliang Shen Ziyong Hou Shimin Zhao Xingyu and Xue Zengquan |
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| Abstract: | Fe(OH)3 colloid particles with diameter less than 10 nanometer are synthesized by rapid thermal hydrolyzation. The results of X-ray diffraction (XKD) and Transmission Electron Microscope (TEM) show that the colloid particles are changed into Fe2O3 nanoparticles after dehydration.The congregation of colloid particles on Si substrate are successfully avoided by centrifugal drying. Well-dispersed Fe2O3 colloid particles on Si surface are obtained. Influence of concentration of Fe2O3 colloid solution on the size and dispersion of particles was studied.The results show that the dispersion of Fe2O3 colloid particles can be adjusted by varying the solution concentration of colloid solution, but it does not affect on the size distribution of Fe2O3 colloid particles. |
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| Keywords: | Hydrolyzation Nanoparticles Centrifugal dispersion |
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