| 轴向载荷作用下的样品微纳米形貌测量装置 |
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| 引用本文： | 闫永达,胡振江,赵学森,王景贺,周琴,孙涛,董申. 轴向载荷作用下的样品微纳米形貌测量装置[J]. 纳米技术与精密工程, 2010, 8(5): 381-388 |
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| 作者姓名： | 闫永达 胡振江 赵学森 王景贺 周琴 孙涛 董申 |
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| 作者单位： | 哈尔滨工业大学精密工程研究所,哈尔滨,150001 |
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| 基金项目： | 哈尔滨工业大学科研创新基金资助项目，中国博士后基金资助项目 |
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| 摘 要： | 为解决材料在受力状态下微观形貌的检测问题,开发了一套原位拉伸实验装置.该装置可以与不同测量设备结合,在样品被拉伸过程中,观察微纳米尺度的形貌变化.对于一个20 mm长的样件,该装置可以实现拉伸的最大应变为400%,最大拉伸力为19.6 N.以薄膜材料为例,观察了样品在受轴向拉伸载荷状态下微米尺度和纳米尺度形貌的变化情况,同时得到了应力-应变曲线.实验结果验证了本装置的可行性.
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| 关 键 词： | 机械特性 AFM CCD 拉伸测试 |
Micro/Nano Topography Measurement Device for Samples Under Coaxial Load |
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| YAN Yong-da,HU Zhen-jiang,ZHAO Xue-sen,WANG Jing-he,ZHOU Qin,SUN Tao,DONG Shen. Micro/Nano Topography Measurement Device for Samples Under Coaxial Load[J]. Nanotechnology and Precision Engineering, 2010, 8(5): 381-388 |
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| Authors: | YAN Yong-da HU Zhen-jiang ZHAO Xue-sen WANG Jing-he ZHOU Qin SUN Tao DONG Shen |
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| Affiliation: | (Center for Precision Engineering,Harbin Institute of Technology,Harbin 150001,China) |
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| Abstract: | In order to solve the problem of micro/nano topography measurement of materials under load, an in-situ tensile test device was developed, which can be integrated with various measurement instruments to measure the micro/nano topography variations of the samples in the tensile process. The maximum strain of 400% and the maximum tensile force of 19.6 N can be achieved by the device for a sample 20 mm in length. With thin film as the sample, the variations in the micro/nano topography of the sample under the coaxial tensile load were studied and the corresponding strain-stress curve was obtained. The feasibility of the device was verified by experimental results. |
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| Keywords: | AFM CCD mechanical property AFM CCD tensile test |
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