|
|||||
|
|
Properties of Ta–Mo alloy gate electrode for n-MOSFET |
|
| Authors: | Chung Keun Lee Jae Young Kim Shin Nam Hong Huicai Zhong Bei Chen Veena Misra |
| Affiliation: | 1. School of Electronic Engineering, Telecommunication and Computer Engineering, Hankuk Aviation University, 200-1, Hwajon-dong, Deokyang-gu, Kyonggi-do, Koyang-City, 412-791, Korea 2. Advanced Micro Devices, Hopewell Junction, NY, 12533, USA 3. Department of Electrical and Computer Engineering, North Carolina State University, Raleigh, NC, 27695, USA |
| Abstract: | |
| Keywords: | |
| 本文献已被 SpringerLink 等数据库收录！ | |