| 多层复合真空离子镀膜技术的新发展 |
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| 引用本文： | 王增福,陈步亮,范斌,张再鸣,李然.多层复合真空离子镀膜技术的新发展[J].真空,2002(3):10-12. |
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| 作者姓名： | 王增福 陈步亮 范斌 张再鸣 李然 |
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| 作者单位： | 中国空间技术研究院,北京,100029 |
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| 摘 要： | 本文回顾了多弧——磁控溅射多功能离子镀膜设备的结构和功能，并且对该设备在氮化钛掺金离子镀（IPG）方面的典型应用，做了较为详细的膜层性能分析。同时，本文了对近年来一种新型的多功能离子镀设备——复合式离子镀膜设备的结构及特点做了介绍，给出了该类型设备的典型应用场合，并且向读者介绍了使用该设备镀制的金属/金属陶瓷多层膜的优异性能。
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| 关 键 词： | 多层复合真空离子镀膜技术 离子镀 多层镀 磁控溅射 镀膜设备 |
| 文章编号： | 1002-0322(2002)03-0010-03 |
| 修稿时间： | 2002年5月8日 |
New development of ion coating equipment in multi-layer film |
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| WANG Zeng-fu,CHEN Bu-liang,FAN Bing,ZHANG Zai-ming,LI Ran.New development of ion coating equipment in multi-layer film[J].Vacuum,2002(3):10-12. |
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| Authors: | WANG Zeng-fu CHEN Bu-liang FAN Bing ZHANG Zai-ming LI Ran |
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| Abstract: | The structure and the function of multi-arc and sputtering coating machine are reviewed, and the coating properties of TiN Au(IPG) are prepared by this kind of machine discussed. Then, the structure and the feature of this kind of new multi-function ion plating machine, composite ion coating machine, are introduced. We can find its some model application in the field of surface plating. A special multi-layer coating of metal/cermets was prepared by the machine which has very excellent performance. |
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| Keywords: | multi-function ion plating multi-layer film |
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