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Role of Duty Ratio in Diamond Growth by Pulsed DC-Bias Enhanced Hot Filament Chemical Vapour Deposition |
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| Authors: | MENG Liang ZHOU Haiyang ZHU Xiaodong |
| Affiliation: | CAS Key Laboratory of Basic Plasma Physics, Department of Modern Physics University of Science and Technology of China, Hefei 230026, China |
| Abstract: | duty ratio, diamond film, pulsed biasing |
| Keywords: | duty ratio diamond film pulsed biasing |
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