| Collisional Sheath in the Electronegative Radio-Frequency Plasma |
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| 作者姓名： | 甘宝霞 邓文隽 陈银华 |
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| 作者单位： | CAS Key Laboratory of Basic Plasma Physics, Department of Modern Physics,University of Science and Technology of China, Hefei 230026, China |
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| 基金项目： | supported by the National Natural Science Foundation of China （Nos. 10375063 and 40336052） |
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| 摘 要： | A model of collisional RF sheath with negative ions is discussed in this paper. The influences of collision and negative ions on the parameters of the sheath are studied through numerical simulation. It is found that when the collision coefficient increases and the RF power is fixed, the electrode potential and sheath electric field potential increase, the electrode current and thickness of the sheath decrease. When the negative ion content changes, the same phenomenon Occurs,
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| 关 键 词： | 阴离子 碰撞 射频 等离子体 电子领域 |
| 修稿时间： | 2006-09-15 |
Collisional Sheath in the Electronegative Radio-Frequency Plasma |
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| GAN Baoxia, DENG Wenjuan, CHEN Yinhua.Collisional Sheath in the Electronegative Radio-Frequency Plasma[J].Plasma Science & Technology,2007,9(4):398-402. |
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| Authors: | GAN Baoxia DENG Wenjuan CHEN Yinhua |
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| Affiliation: | CAS Key Laboratory of Basic Plasma Physics, Department of Modern Physics University of Science and Technology of China, Hefei 230026, China |
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| Abstract: | A model of collisional RF sheath with negative ions is discussed in this paper. The influences of collision and negative ions on the parameters of the sheath are studied through numerical simulation. It is found that when the collision coefficient increases and the RF power is fixed, the electrode potential and sheath electric field potential increase, the electrode current and thickness of the sheath decrease. When the negative ion content changes, the same phenomenon Occurs, |
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| Keywords: | collision RF negative ion |
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