| Two-Dimensional Self-Consistent Kinetic Model for Solenoidal Inductively Coupled Plasma |
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| 作者姓名： | 毛明 戴忠玲 王友年 |
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| 作者单位： | State Key Laboratory of Materials Modification, Department of Physics, Dalian Universityof Technology, Dalian 116024, China |
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| 基金项目： | supported by the National Science Foundation of China （Nos.10376003 10572035） |
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| 摘 要： | A two-dimensional self-consistent kinetic model was developed to study the influence of the various factors on the electron energy distribution function. These factors include gas pressure the driving frequency, the radius and length of the inductively coupled plasma equipment, the amplitude of the radio-frequency coil current, and the number of turns of rf coils. The spatial profiles of the rf electric field and power density have also been calculated under the same parameters. Numerical results show that the electron energy distribution functions are significantly modified and the spatial profiles of the rf electric field and rf power density are also demonstrated.
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| 关 键 词： | 电感耦合等离子体 二维自调和动力学模型 螺线管 电子能分布 蚀刻 |
| 修稿时间： | 2006-01-09 |
Two-Dimensional Self-Consistent Kinetic Model for Solenoidal Inductively Coupled Plasma |
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| MAO Ming, DAI Zhongling, WANG Younian.Two-Dimensional Self-Consistent Kinetic Model for Solenoidal Inductively Coupled Plasma[J].Plasma Science & Technology,2007,9(1):30-34. |
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| Authors: | MAO Ming DAI Zhongling WANG Younian |
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| Affiliation: | State Key Laboratory of Materials Modification, Department of Physics, Dalian University of Technology, Dalian 116024, China |
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| Abstract: | A two-dimensional self-consistent kinetic model was developed to study the influence of the various factors on the electron energy distribution function. These factors include gas pressure the driving frequency, the radius and length of the inductively coupled plasma equipment, the amplitude of the radio-frequency coil current, and the number of turns of rf coils. The spatial profiles of the rf electric field and power density have also been calculated under the same parameters. Numerical results show that the electron energy distribution functions are significantly modified and the spatial profiles of the rf electric field and rf power density are also demonstrated. |
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| Keywords: | two-dimensional inductively coupled plasma electron energy distribution power deposition |
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