| Kinetic Monte Carlo Simulation of Deposition of Co Thin Film on Cu（001） |
| |
| 引用本文： | 刘祖黎,石艳丽,荆兴斌,哈莉,姚凯伦.Kinetic Monte Carlo Simulation of Deposition of Co Thin Film on Cu（001）[J].等离子体科学和技术,2007,9(5):550-555. |
| |
| 作者姓名： | 刘祖黎 石艳丽 荆兴斌 哈莉 姚凯伦 |
| |
| 作者单位： | [1]Department of Physics, Huazhong University of Science and Technology, Wuhan 430074, China [2]International Center of Materials Physics, Chinese Academy of Sciences, Shenyang 110016, China |
| |
| 基金项目： | supported by National Natural Science Foundation of China （Nos. 10574047. 20490210） and China ‘973＇ Plan （No. 2006CB921606） |
| |
| 摘 要： | A kinetic Monte Carlo （kMC） simulation is conducted to study the growth of ultrathin film of Co on Cu（001） surface. The many-body, tight-binding potential model is used in the simulation to represent the interatomic potential. The film morphology of heteroepitaxial Co film on a Cu（001） substrate at the transient and final state conditions with various incident energies is simulated. The Co covered area and the thickness of the film growth of the first two layers are investigated. The simulation results show that the incident energy influences the film growth and structure. There exists a transition energy where the interracial roughness is minimum. There are some void regions in the film in the final state, because of the influence of the island growth in the first few layers. In addition, there are deviations from ideal layer-by-layer growth at a coverage from 0 - 2 monolayers （ML）.
|
| 关 键 词： | 钴薄膜 铜基体 异体外延生长 动力学蒙特卡洛模拟 |
| 修稿时间： | 2006-11-07 |
Kinetic Monte Carlo Simulation of Deposition of Co Thin Film on Cu（001） |
| |
| LIU Zuli, SHI Yanli , JING Xingbin, YU Li, YAO Kailun.Kinetic Monte Carlo Simulation of Deposition of Co Thin Film on Cu（001）[J].Plasma Science & Technology,2007,9(5):550-555. |
| |
| Authors: | LIU Zuli SHI Yanli JING Xingbin YU Li YAO Kailun |
| |
| Affiliation: | Department of Physics, Huazhong University of Science and Technology, Wuhan 430074; China 2 International Center of Materials Physics, Chinese Academy of Sciences; Shenyang 110016 |
| |
| Abstract: | heteroepitaxial growth, kinetic Monte Carlo, growth mode, film structure |
| |
| Keywords: | heteroepitaxial growth kinetic Monte Carlo growth mode film structure |
| 本文献已被 维普 等数据库收录！ |
|
