Effect of atomic layer deposited aluminium oxide on mechanical properties of porous silicon carbide |
| |
| Affiliation: | 1. University of Tartu, Institute of Physics, Department of Materials Science, Ravila 14C, EE-50411 Tartu, Estonia;2. Tallinn University of Technology, Department of Materials Engineering, Ehitajate tee 5, EE-19086 Tallinn, Estonia;3. ITMO University, Kronversky 49, Saint Petersburg 197101, Russia;4. University of Helsinki, Department of Chemistry, P.O. Box 55, FI-00014 Helsinki, Finland;1. Hunan Key Laboratory of Micro–Nano Energy Materials and Devices, Xiangtan University, Hunan 411105, PR China;2. Laboratory for Quantum Engineering Micro–Nano Energy Technology, School of Physics and Optoelectronics, Xiangtan University, Hunan 411105, PR China;1. School of Materials Science and Engineering, Anhui University of Technology, Maanshan 243002, PR China;2. Department of Electrical Engineering, The Hong Kong Polytechnic University, Hung Hom, Kowloon, Hong Kong;1. Escola Técnica de Saúde, Universidade Federal da Paraíba, Cidade Universitária, João Pessoa CEP 58051-900, PB, Brazil;2. Departamento de Engenharia de Materiais, Universidade Federal de Campina Grande, Av. Aprígio Veloso 882, Catolé, Campina Grande CEP 58 429-900, PB, Brazil;3. Departamento de Engenharia de Materiais, Universidade Federal da Paraíba, Cidade Universitária, João Pessoa CEP 58051-900, PB, Brazil;1. Department of Materials Science and Engineering, National Cheng Kung University, Tainan City 70101, Taiwan;2. Research Center for Energy Technology and Strategy, National Cheng Kung University, Tainan City 70101, Taiwan;3. Center for Micro/Nano Science and Technology, National Cheng Kung University, Tainan City 70101, Taiwan |
| |
| Abstract: | Silicon carbide nanopowder was coated with amorphous alumina by atomic layer deposition (ALD), using trimethylaluminium Al(CH3)3 (TMA) and water as precursors. The ALD experiments were carried out at 300 °C, using variable cycle count or changing pulse times at constant cycle count. Depending on deposition conditions, hardness averaging at 14.8 GPa and corresponding reduced elastic modulus of 114 GPa were measured. Maximum hardness values and reduced moduli of elasticity reached 25–30 and 134–202 GPa, respectively, improving the mechanical properties of composites. Increased precursor flow had positive effect on mechanical properties – maximum values of hardness and elastic module reached 35–45 and 218–261 GPa, respectively. In the composites, the mechanical properties were improved compared to pure alumina films or silicon carbide and the brittleness characteristic of SiC particle tablets was decreased. |
| |
| Keywords: | Nanocomposite Nanoindentation Atomic layer deposition |
| 本文献已被 ScienceDirect 等数据库收录！ |
|
