| 316L不锈钢表面沉积类金刚石膜的拉曼光谱分析及润湿性研究 |
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| 引用本文： | 孙建华,刘金龙,王庆良,吴高峰. 316L不锈钢表面沉积类金刚石膜的拉曼光谱分析及润湿性研究[J]. 表面技术, 2011, 40(2): 55-57,61 |
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| 作者姓名： | 孙建华 刘金龙 王庆良 吴高峰 |
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| 作者单位： | 中国矿业大学,材料科学与工程学院,徐州,221116 |
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| 基金项目： | 清华大学摩擦学国家重点实验室开放基金资助项目 |
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| 摘 要： | 采用等离子体辅助化学气相沉积(PECVD)法,在316L不锈钢基体表面以不同的沉积气压和射频功率制备出类金刚石(DLC)薄膜.拉曼光谱分析结果表明:所沉积的DLC膜具有典型的类金刚石膜结构,薄膜中sp#键含量随工艺参数的不同而不同,射频功率100 W时,sp#键含量随沉积气压增高而降低.接触角测试结果表明:DLC膜沉积...
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| 关 键 词： | 316L不锈钢 类金刚石膜 拉曼光谱 润湿性 |
Raman Spectra and Wettability Analysis of DLC Films Deposited on 316L Stainless Steel |
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| SUN Jian-hua,LIU Jin-long,WANG Qing-liang,WU Gao-feng. Raman Spectra and Wettability Analysis of DLC Films Deposited on 316L Stainless Steel[J]. Surface Technology, 2011, 40(2): 55-57,61 |
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| Authors: | SUN Jian-hua LIU Jin-long WANG Qing-liang WU Gao-feng |
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| Affiliation: | SUN Jian-hua,LIU Jin-long,WANG Qing-liang,WU Gao-feng(School of Materials Science and Technology,China University of Mining and Technology,Xuzhou 221116,China) |
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| Abstract: | Diamond-like carbon(DLC) films were deposited on 316L stainless steel by plasma enhanced chemical vapor deposition(PECVD) under different deposition pressure and radio frequency power.The deposited films were characterized by Raman spectra.The results show that the deposited films have typical structure of DLC films.sp3 content in deposited films is different under various process parameters,and decreases with deposition pressure when radio frequency power is 100 W.The contact angle test results show that t... |
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| Keywords: | 316L stainless steel DLC films raman spectra wettability |
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