| 化学汽相沉积法制SnO2掺杂薄膜及其气敏特性的机理研究 |
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| 引用本文： | 冯金恒 杨日福. 化学汽相沉积法制SnO2掺杂薄膜及其气敏特性的机理研究[J]. 仪表技术与传感器, 1999, 0(4): 14-16 |
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| 作者姓名： | 冯金恒 杨日福 |
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| 作者单位： | 华南理工大学物理系 |
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| 摘 要： | 】文中探讨用汽相沉积法制备ＳｎＯ２掺杂薄膜的不同工艺。研究ＳｎＯ２掺杂薄膜的光谱透过率气敏特性，测试掺５％Ａｇ的ＳｎＯ２薄膜在不同比例乙醇气体气敏作用下表面电阻气敏特性曲线。结果表明，汽相沉积法制备ＳｎＯ２掺杂薄膜工艺重复性好，灵敏度高，可用于制造新型的“气敏—光透过性”型气敏传感器。
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| 关 键 词： | 二氧化锡 薄膜 气敏 光谱透过率 |
The Study of the Spectrum Transmission Gas Sensing Characters of Adulterate SnO 2 Thin Flim Made with Vapour Deposition |
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| Feng Jinyuan Yang Rifu Liu Lin South China University of Technology,Guangzhou. The Study of the Spectrum Transmission Gas Sensing Characters of Adulterate SnO 2 Thin Flim Made with Vapour Deposition[J]. Instrument Technique and Sensor, 1999, 0(4): 14-16 |
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| Authors: | Feng Jinyuan Yang Rifu Liu Lin South China University of Technology Guangzhou |
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| Affiliation: | Feng Jinyuan Yang Rifu Liu Lin South China University of Technology,Guangzhou 510641 |
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| Abstract: | It is presented in this paper the technologe of manufacturing adulterated SnO 2 thin film made with vapour deposition and its spetrum transmission gas sensing characters.The gas sensitive curve of adulterated 5%Ag SnO 2 thin film's surface resistance is tested in different alcohol gas environments. Experiment result shows that this method has many advantages such as well repeating ability of technology,higher gas sensitivity and so on.It can be used to make a new kind of gas sensitive optical sensor. |
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| Keywords: | SnO 2 Thin Film Gas Sensing Spetrum transmission |
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