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| Al／Si_3N_4／TbFeCo／Si_3N_4磁光盘厚度定量计算方法 | |
| 引用本文： | 眭松山,魏军. Al／Si_3N_4／TbFeCo／Si_3N_4磁光盘厚度定量计算方法[J]. 中国激光, 1995, 22(6): 442-448 |
| 作者姓名： | 眭松山 魏军 |
| 作者单位： | 电子科技大学信息材料工程学院 |
| 摘 要： | 研究用ＸＲＦ基本参数法计算磁光盘的厚度和组成，铝层厚度用ＡＩＫα线计算，两层氨化硅厚度都采用ＳｔＫα线计算确定，磁光记录层采用ＦｅＫα，ＣｏＫα和ＴｂＬα线来确定其厚度及组成。列出了膜厚方程，可由计算机很快解出，其结果与标准符合很好。 |
| 关 键 词： | 磁光盘，基本参数法，膜厚及组成 |
| 收稿时间： | 1994-07-29 |
Quantitative Calculation Method of Thickness of a Al/Si_3N_4/TbFeCo/Si_3N_4 Magneto-optic Disk |
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| Sui Songshan, Wei Jun. Quantitative Calculation Method of Thickness of a Al/Si_3N_4/TbFeCo/Si_3N_4 Magneto-optic Disk[J]. Chinese Journal of Lasers, 1995, 22(6): 442-448 | |
| Authors: | Sui Songshan Wei Jun |
| Abstract: | A fundamental parameter XRF method for the determination of thickness and composition of a magneto-optic disk was studied. The measured Al Kαlins was used to calculate Al layer, while both Si3N4 layers were measured by total Si Kα itensities to discriminate each Si3N4 layer. A fundamental parameter method was used for calculations of magneto-optic layers by Fe Kα, Co Kα and Tb Lα Lines. Equations can be evaluated readily by a computer. The result is in good agreement with the standard sample. |
| Keywords: | magneto-optic disk fundamental parameter method thickness and composition of films |
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