| 表面镀钛对金刚石薄膜场发射特性的影响 |
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| 引用本文： | 张新月,麻华丽,赵永梅,姚宁,曾凡光.表面镀钛对金刚石薄膜场发射特性的影响[J].纳米科技,2012(4):54-57. |
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| 作者姓名： | 张新月 麻华丽 赵永梅 姚宁 曾凡光 |
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| 作者单位： | [1]郑州航空工业管理学院数理系,河南郑州450015 [2]中国科学院半导体研究所材料中心,北京100083 [3]郑州大学材料物理教育部重点实验室,河南郑州450052 |
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| 基金项目： | 国家自然科学基金项目（No.51002143,No.51072184）,航空基金项目（No.2009ZE55003,No.2010ZF55013）,河南省科技厅项目（No.092300410139）,河南省高等学校青年骨干教师资助计划项目（2010GGJS-146）,河南省教育厅自然科学基础研究计划项目（No.20108140015,No.2011A140027） |
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| 摘 要： | 利用等离子体化学气相（MWPCVD）沉积法在Si（100）面上沉积了金刚石薄膜，采用SEM、AFM、XRD、Raman、XPS等方法对薄膜的结构及表面形貌进行了分析。为提高薄膜的场发射性能，在金刚石表面溅射了金属Ti，对比金刚石薄膜、金刚石／金属Ti复合薄膜的场发射性能，结果表明，金刚石／金属Ti薄膜的发射电流密度更大，且随着电场的增加电流密度急剧增加，开启电场低，约为3V／μm，当电场为25V／μm时发射电流密度可达到1400mA／cm2，并在机理上进行了一些探索，对金刚石／金属复合结构薄膜的场发射性能研究有重要意义。
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| 关 键 词： | 金刚石薄膜 金属Ti层 场发射 |
Effect of Metal Ti Layer on Field Emission Properties of Diamond Film |
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| Authors: | ZHANG Xin-yue MA Hua-li ZHAO Yong-mei YAO Ning ZENG Fan-guang |
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| Affiliation: | 1.Zheng Zhou Institute of Aeronautical Industry Management, Zhengzhou 450015, China) (2. Novel Semiconductor Material Laboratory, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China) (3. Key Laboratory of Material Physics, Ministry of Education, Zhengzhou University, Zhengzhou 450052, China) |
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| Abstract: | Diamond film and diamond/Ti film were synthesized by microwave plasma chemical vapor deposition （MW- PCVD） method on Si（100）. The surface morphology and the structure of the films were tested by Scanning Electron Micro- scope（SEM） ,Atomic Force Microscope （AFM）.Raman,X-ray diffraction （XRD）.Possible mechanism in the paper were al- so studied.In order to improve the field emission properties of thin films, sputtered the metal of Ti on the diamond sur- face, Compared the field emission properties of diamond and diamond ]Ti films. The results showed that diamond FFi film had larger emission current. Field emission current density increased rapidly with the increasing of electric field and reaches to 1400μA/cm2 at 25V/μm. Also take some exploration in the mechanism, which has great meaning to the re- search of field emission properties of diamond / metal composite structure films. |
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| Keywords: | diamond film Ti layer field emission |
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