3D multiscale controlled micropatterning of lead-free piezoelectric electroceramics via Epoxy Gel Casting and lift-off |
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| Affiliation: | 1. Department of Materials and Ceramics Engineering, CICECO, University of Aveiro, 3810-193 Aveiro, Portugal;2. TEMA-NRD, Aveiro Institute of Nanotechnology (AIN), University of Aveiro, 3810-193 Aveiro, Portugal;3. NSCBM Govt. College Hamirpur, Himachal Pradesh University, Shimla-05, India;4. Department of Physics, Amity University, Dubai, United Arab Emirates;5. School of Metallurgy and Materials, University of Birmingham, Birmingham, UK;1. The Key Laboratory of Inorganic Functional Materials and Devices, Shanghai Institute of Ceramics, Chinese Academy of Sciences, Shanghai 200050, PR China;2. State Key Laboratory of High Performance Ceramics and Superfine Microstructure, Shanghai Institute of Ceramics, Chinese Academy of Sciences, Shanghai 200050, PR China;1. Chemistry Division, Bhabha Atomic Research Centre, Trombay, Mumbai 400085, India;2. Technical Physics Division, Bhabha Atomic Research Centre, Trombay, Mumbai 400085, India;3. Department of Physics, Wayne State University, Detroit, MI 48202, USA;1. National Institute of Materials Physics, Bucharest Magurele, 077125, Romania;2. Bucharest University, Faculty of Physics, 077125, Bucharest-Magurele, Romania;1. Nanoengineering Research Group, Centre for Mechanical Technology and Automation, Department of Mechanical Engineering, University of Aveiro, 3810-193 Aveiro, Portugal;2. Instituto de Soldadura e Qualidade, Taguspark, 2740 - 120 Porto Salvo, Portugal;1. Department of Physics, College of Science, King Khalid University, P.O. Box 9004, Abha, 61413, Saudi Arabia;2. TEMA-NRD, Department of Mechanical Engineering and Aveiro Institute of Nanotechnology (AIN), University of Aveiro, 3810-193, Aveiro, Portugal;3. Department of Materials Engineering and Ceramic, CICECO, University of Aveiro, 3810-193, Aveiro, Portugal;4. National Research University of Electronic Technology “MIET”, 124498 Moscow, Russia;1. TEMA-NRD, Mechanical Engineering Department, Aveiro Institute of Nanotechnology (AIN), University of Aveiro, 3810-193 Aveiro, Portugal;2. Department of Ceramic and Glass Engineering, CICECO, University of Aveiro, 3810-193 Aveiro, Portugal;3. Department of Physics, School of Basic and Applied Sciences, Central University of Tamil Nadu, Thiruvarur 610101, India |
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| Abstract: | We report on the fabrication of multiscale three-dimensional (3D) micropatterning of 0.5Ba(Zr0.2Ti0.8)O3 ? 0.5(Ba0.7Ca0.3)TiO3 (BZT ? BCT) electroceramic material using soft lithographic PDMS moulds. The ceramic microcomponents were successfully consolidated by Epoxy Gel Casting from stable aqueous suspension of BZT-BCT material. A successful aqueous processing of electroceramic material was employed with surface protection of powder particles against hydrolysis as considerably an important parameter to achieve high solid loading suspension with pseudoplastic behaviour suitable for casting in micro scale moulds. The process to obtain micro sized pattern of material was divided in two steps: (i) production of high quality SU-8 master moulds and the respective negative replicas in PDMS (soft mould) by photolithography and soft mould replication, respectively; (ii) casting the soft moulds by stable high solid loading BZT-BCT suspensions in presence of gelation agents followed by de-moulding, drying and sintering. The resulting green micropattern structures show interesting features, including complex structures with a periodic variations through their length and, multiscale array of hexagonal shaped pillars of different aspect ratios (AR) (max AR ≈ 8 with approx ～320 μm of height and side length ～40 μm) with smooth side wall features along height. The green pillar arrays were further sintered to show the suitability of aqueous processing of material and proposed casting method. |
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| Keywords: | BZT-BCT electroceramics Micropatterning Aqueous suspension |
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