| Preparation of YBa_2Cu_3O_(7-x) Superconductor Film by Ion Beam Sputtering |
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| 作者姓名： | 胡倾宇 闻立时 乔桂文 庄育智 |
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| 作者单位： | Institute of Metal Research Academia Sinica Shenyang China.，Institute of Metal Research Academia Sinica Shenyang China.，Institute of Metal Research Academia Sinica Shenyang China.，Institute of Metal Research Academia Sinica Shenyang China. |
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| 摘 要： | Since the discovery of high T_c super-conductor, much effort was made toits application. More and more evidencehas revealed that most promising fieldof high T_c superconductor first to havesuccess must be the microelectronics andcomputer. Superconductor films for mi-croelectronic application are preparedby PVD method, such as electron beamevaporation, pulsed laser evaporation andmagnetron sputtering. In this paper, thepreliminary results of ion beam sputteringdeposition of YBaCuO film are reported
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| 收稿时间： | 1989-09-28 |
Preparation of YBa_2Cu_3O_(7-x) Superconductor Film by Ion Beam Sputtering |
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| HU Qingyu WEN Lishi QIAO Guiwen ZHUANG Yuzhi Institute of Metal Research,Academia Sinica,Shenyang,China..Preparation of YBa_2Cu_3O_(7-x) Superconductor Film by Ion Beam Sputtering[J].Journal of Materials Science & Technology,1989,5(5):366-368. |
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| Authors: | HU Qingyu WEN Lishi QIAO Guiwen ZHUANG Yuzhi Institute of Metal Research Academia Sinica Shenyang China |
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| Abstract: | |
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| Keywords: | superconductor film ion beam sputtering |
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