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MEMS微电磁驱动器磨损对光开关性能的影响分析
引用本文:贾书海,朱军,赵小林,杨春生,丁桂甫,蔡炳初. MEMS微电磁驱动器磨损对光开关性能的影响分析[J]. 微细加工技术, 2007, 2(2): 49-51
作者姓名:贾书海  朱军  赵小林  杨春生  丁桂甫  蔡炳初
作者单位:1. 西安交通大学,理学院,光信息科学与技术系,西安,710049
2. 上海交通大学,微纳米科学与技术研究院,上海200030
基金项目:国家自然科学基金;教育部跨世纪优秀人才培养计划;陕西省科技攻关项目;陕西省西安市科技攻关项目
摘    要:光开关中运动元件的磨损对光学元件的位置精度有重要影响。介绍了MEMS微电磁驱动器磨损对光开关光学性能影响的理论分析,采用光纤光学理论计算了磨损所引起的光开关的附加插入损耗,结果表明,所采用的微电磁驱动器磨损引起的附加插入损耗小于0.02 dB,其磨损特性可以满足光通信开关的要求,实验结果证明了理论分析的正确性。此方法对光开关和MEMS微驱动器的研究具有指导意义。

关 键 词:微机电系统(MEMS)  微电磁驱动器  光开关  磨损
文章编号:1003-8213(2007)02-0049-03
修稿时间:2006-10-08

Analysis of Influence of MEMS Electromagnetic Microactuator Wear on Performance of Optic-fiber Switch
JIA Shu-hai,ZHU Jun,ZHAO Xiao-lin,YANG Chun-sheng,DING Gui-fu,CAI Bing-chu. Analysis of Influence of MEMS Electromagnetic Microactuator Wear on Performance of Optic-fiber Switch[J]. Microfabrication Technology, 2007, 2(2): 49-51
Authors:JIA Shu-hai  ZHU Jun  ZHAO Xiao-lin  YANG Chun-sheng  DING Gui-fu  CAI Bing-chu
Abstract:The position precision of optical elements is one of the most important factors influencing the performance of optic-fiber switch.The wear of the movable components in optic-fiber switch has a serious influence on the position precision of optical elements.The theory of the effects of the wear of the electromagnetic microactuator on the performance of optic-fiber switch was presented.The optical theory of optical fibers was applied to calculate the accessional insertion loss of optic-fiber switch caused by wear.The results show that the accessional insertion loss caused by the wear of electromagnetic microactuator is less than 0.02 dB and the wear performance can meet the requirements of the optic-fiber switch,and it is in agreement with the experimental results.It can be believed that the work is significance for the research of other optic-fiber switches and MEMS microactuators.
Keywords:micro electro mechanical systems(MEMS)  electromagnetic microactuator  optic-fiber switch  wear
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