计及动子振动的直线超声波电机驱动性能分析

文章研究了动子的振动对驻波型直线超声波电机驱动性能的影响。在传统驻波型超声波电机的驱动机理的基础上，通过在定子的不同振动阶段建立动子振动时的驱动力数学模型，研究了动子振幅对驻波型直线超声波电机驱动性能的影响。理论分析表明，动子振幅越大，电机的驱动性能下降越严重。在此基础上，文章通过采用U型结构动子，并附加阻尼的方式，有效的降低了动子振幅，提高了电机的输出。有限元分析证明了动子的减振效果，实验证明了理论的正确性和方案的可行性。

Analysis of Driving Performance of Linear Ultrasonic Motor Considering Slider Vibration

In this paper,the influence of the vibration of slider on the driving performance of standing wave linear ultrasonic motor is studied.Based on the driving mechanism of the traditional standing wave ultrasonic motor,the driving force modelconsidering slider vibration is established in different vibration stages of stator,andthe influence of the amplitude of the slider on the driving performance is studied too.The theoretical analysis shows that the larger the amplitude of the slider is,the worse the motor drive performance is.On the basis of this,thisarticle adopts u-shaped structure slider and damping material to effectively reduce the amplitude of the slider and improve the output of the motor.The finite element analysis proves the vibration damping effect of the slider,and the experiment proves the correctness of the driving force model and the feasibility of the scheme.