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计算电容屏蔽电极位移测量的不确定度评估
引用本文:王建波,殷聪,钱进,刘忠有,黄璐,杨雁,陆祖良.计算电容屏蔽电极位移测量的不确定度评估[J].计量学报,2022,43(4):437-444.
作者姓名:王建波  殷聪  钱进  刘忠有  黄璐  杨雁  陆祖良
作者单位:中国计量科学研究院,北京 100029
基金项目:国家重点研发计划(2016YFF0200302,2016YFF0200105);
摘    要:计算电容是电学阻抗单位复现的基准装置,是电容、电感和交流电阻的溯源依据.它是电磁计量领域内除量子电压、量子电阻基准之外准确度最高的装置.计算电容装置实现微小电容值(0.2至0.6 pF)精确测量的关键在于对其屏蔽电极位移的高准确度测量.从计算电容屏蔽电极位移测量的基本原理出发,系统分析了屏蔽电极位移测量结果的影响因素,...

关 键 词:计量学  计算电容  位移测量  锁定干涉仪  不确定度评估  屏蔽电极
收稿时间:2021-03-19

Uncertainty Evaluation on Displacement of Blocking Electrodes in Calculable Capacitor
WANG Jian-bo,YIN Cong,QIAN Jin,LIU Zhong-you,HUANG Lu,YANG Yan,LU Zu-liang.Uncertainty Evaluation on Displacement of Blocking Electrodes in Calculable Capacitor[J].Acta Metrologica Sinica,2022,43(4):437-444.
Authors:WANG Jian-bo  YIN Cong  QIAN Jin  LIU Zhong-you  HUANG Lu  YANG Yan  LU Zu-liang
Affiliation:National Institute of Metrology, Beijing 100029, China
Abstract:The calculable capacitor is a classical and fundamental experiment apparatus in precise electromagnetic measurements. It is followed the ‘new’ electromagnetic principle which is firstly introduced by Lampard D G and Thompson A E. The calculable capacitor is the AC impedance primary standard, and its the traceable source of the capacitance, inductance and AC impedance. It is a high-accuracy (at the level of 10-8) apparatus surpassed only by the quantum Josephson voltage and quantum Hall resistance experiments in the electromagnetic metrological field, and it is expected to reach the level of 10-9 through continual improvements and optimizations to improve the uncertainty level of electromagnetic metrology. The basic principle of the displacement measurement in calculable capacitor is presented, and impact factors, including Fabry-Perot interferometer locking, laser wavelength, residual index of refraction of air, cosine error and Gouy phase correction, are analyzed. Combining the repeatability of capacitance produced by calculable capacitor, a relative standard uncertainty of 4.7×10-9 is obtained.
Keywords:metrology  calculable capacitor  displacement measurement  locking interferometer  uncertainty evaluation  blocking electrode  
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