自动对焦显微镜系统设计及仿真

设计了一种基于条纹投影的自动对焦显微镜系统。通过红外光源将光栅掩膜板投射到被测物表面,用于对焦判断。通过白光光源进行系统照明。使用带通滤光片分离出由红外光源投射的光栅像,并由线阵CCD采集,用于离焦量和离焦方向的判断。由白光光源照射得到被测物的像,并由面阵CCD接受用于直接观测。使用Tracepro对设计的系统进行仿真,分析得到适用于线阵CCD采集的光栅图的一维清晰度评价函数,并使用系统对不同被测物进行仿真对焦实验与误差分析。仿真结果表明,本系统可对不同被测物进行自动对焦。

Design and Simulation of Auto-Focus Microscopy System

An auto-focus microscope system based on stripe projection is designed.The grating mask was projected onto the surface of the object to be measured by the infrared light source for focus judgment. System illumination was performed by a white light source.The raster image projected by the infrared light source was separated by a bandpass filter and collected by a line CCD for judging the defocus amount and the defocuse direction.The image of the measured object was illuminated by a white light source and accepted by the area CCD for direct observation.The designed system was simulated by Tracepro,the one-dimensional resolution evaluation function of the raster image suitable for linear array CCD acquisition and processing was analyzed.The focus experiment and error analysis of different measured objects were simulated by the system.The simulation results show that the system can focus automatically different measured objects.