| 基于位相检测的光学三维轮廓测量方法 |
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| 引用本文： | 羡一民,舒阳,薛梅.基于位相检测的光学三维轮廓测量方法[J].工具技术,2006,40(11):71-74. |
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| 作者姓名： | 羡一民 舒阳 薛梅 |
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| 作者单位： | 成都工具研究所,610051,成都市;成都工具研究所,610051,成都市;成都工具研究所,610051,成都市 |
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| 摘 要： | 三维轮廓测量是当前光学研究领域中非常活跃的一个技术分支,其中位相测量轮廓术(PMP)在求解中严格遵循物像共轭关系,具有较高的测量精度。DMD器件的出现,更推进了PMP技术的发展。本文重点讨论了位相测量轮廓术(PMP)测量中的典型问题,介绍了PMP的应用现状。
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| 关 键 词： | 光学三维轮廓测量 位相检测 数字微镜器件 |
| 收稿时间： | 2006-01 |
| 修稿时间： | 2006-01 |
Optical 3D Shape Measurement based on Phase Measuring Profilometry |
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| Xie Yimin,Shu Yang,Xue Mei.Optical 3D Shape Measurement based on Phase Measuring Profilometry[J].Tool Engineering(The Magazine for Cutting & Measuring Engineering),2006,40(11):71-74. |
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| Authors: | Xie Yimin Shu Yang Xue Mei |
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| Affiliation: | Xie Yimin Shu Yang Xue Mei |
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| Abstract: | The 3D shape measurement is one of the most active branches of optical research areas recently. The phase measuring profilometry (PMP) can achieve high measuring accuracy since there exists the strict object-to-image mapping in the optical configuration. Combined with digital mirror device (DMD), PMP technology gets rapid progress. In this paper, the existing technical challenges of PMP are introduced, and the current application of PMP is briefly reviewed. |
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| Keywords: | optical 3D shape measurement phase measuring profilometry (PMP) digital mirror device (DMD) |
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