高纯氦气中杂质标准物质的研制

介绍了重量法研制高纯氦气中微量氢气、氖气、氧气、氩气、氮气、甲烷、一氧化碳和二氧化碳8种杂质标准物质的过程,包括重量法制备技术、稀释气中相关杂质的定量及稳定性考察等。研制的8种微量气体标准物质的种类和摩尔分数参照国标GB/T 4844-2011中对高纯氦气的规定,摩尔分数范围在0.5~4.0μmol/mol之间,扩展不确定度为1%~3%（k=2）。通过参加CCQM相关国际关键比对,验证了标准物质量值的准确度。与现有的国家二级标准物质相比,研制的标准物质在种类和不确定度方面都已达到了较高水平。

Development of Impurity Reference Materials in High Purity Helium

The gravimetric preparation process of trace impurities reference materials in high purity helium including hydrogen, neon, oxygen, argon, nitrogen, methane, monoxide carbon and dioxide carbon are introduced. The process includes technology of gravimetric method,quantity of relative impurity in dilution gas,stability test and etc. The amount-of-substance fraction range of eight kinds of trace impurities is between 0.5μmol/mol and 4.0μmol/mol and the expand uncertainty is between 1%~3%(k=2) according to national standard GB/T 4844-2011. The accuracy of value is verified by the international key comparison organized by CCQM. Comparing with current two-class reference materials, developed reference materials in the kinds and uncertainty keep ahead in domestic.