| Mach-Zehnder Type Annealed Proton Exchange Waveguide and Coplanar Waveguide Modulation Electrode LiNbO3 Intensity Modulator |
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| 作者姓名： | HE Jian ZHU Xue-jun |
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| 作者单位： | Chongqing Optoelectronics Research Institute, Chongqing 400060, CHN |
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| 摘 要： | The characteristics of a conventional LiNbO3 intensity modulator made up of a Mach-Zehnder （MZ） type annealed proton exchange（APE） waveguide and coplanar waveguide（CPW） modulation electrode are presented. The APE waveguide characteristics and their relations with process parameters are analyzed. At the same time, the electrical characteristics of modulation electrode, such as modulation voltage, microwave effective index associated with modulation bandwidth, characteristics impedance, are also investigated in detail.
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| 关 键 词： | 退火质子交换波导 铌酸锂亮度调制器 共平面形波导 调制电极 |
| 文章编号： | 1007-0206（2007）01-0069-07 |
| 收稿时间： | 2006-09-29 |
| 修稿时间： | 2006-11-06 |
Mach-Zehnder Type Annealed Proton Exchange Waveguide and Coplanar Waveguide Modulation Electrode LiNbO3 Intensity Modulator |
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| HE Jian ZHU Xue-jun.Mach-Zehnder Type Annealed Proton Exchange Waveguide and Coplanar Waveguide Modulation Electrode LiNbO3 Intensity Modulator[J].Semiconductor Photonics and Technology,2007,47(1):69-75. |
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| Authors: | HE Jian ZHU Xue-jun |
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| Abstract: | The characteristics of a conventional LiNbO3 intensity modulator made up of a Mach-Zehnder(MZ) type annealed proton exchange(APE) waveguide and coplanar waveguide(CPW) modulation electrode are presented. The APE waveguide characteristics and their relations with process parameters are analyzed. At the same time, the electrical characteristics of modulation electrode, such as modulation voltage, microwave effective index associated with modulation bandwidth, characteristics impedance, are also investigated in detail. |
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| Keywords: | intensity modulator APE waveguide CPW |
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