Affiliation: | 1. Institute of Semiconductors, Guangdong Engineering Research Center of Optoelectronic Functional Materials and Devices, South China Normal University, Guangzhou, 510631 China;2. College of Applied Physics and Materials, Wuyi University, 22 Dongcheng Village, Jiangmen, 529020 China;3. School of Intelligent Manufacturing and Equipment, Shenzhen Institute of Information Technology, Shenzhen, 518172 China |