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Resolving Mechanical Properties and Morphology Evolution of Free-Standing Ferroelectric Hf0.5Zr0.5O2 |
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| Authors: | Troy Tharpe Xu-Qian Zheng Philip X.-L. Feng Roozbeh Tabrizian |
| Affiliation: | Department of Electrical & Computer Engineering, Herbert Wertheim College of Engineering, University of Florida, Gainesville, FL, 32611-6200 USA |
| Abstract: | |
| Keywords: | ferroelectrics hafnium zirconium oxide (HfxZr1−xO2) nanomechanical resonators piezoelectrics stress transducer Young's modulus |