| 微型真空传感器制作工艺的研究 |
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| 引用本文： | 俞龙发,冯勇建. 微型真空传感器制作工艺的研究[J]. 仪表技术, 2011, 0(4): 67-70 |
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| 作者姓名： | 俞龙发 冯勇建 |
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| 作者单位： | 厦门大学,机电工程系,福建厦门,361005 |
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| 摘 要： | 介绍微型真空传感器制作工艺的流程,阐述了清洗、氧化、光刻、腐蚀、扩散、键合等工艺的方法和特点,分析了制作工艺过程中出现的问题并提出解决的方法,最后对制作工艺进行总结。
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| 关 键 词： | 光刻 腐蚀 扩散 键合 |
Research of Micro Vacuum Sensor Production Process |
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| YU Long-fa,FENG Yong-jian. Research of Micro Vacuum Sensor Production Process[J]. Instrumentation Technology, 2011, 0(4): 67-70 |
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| Authors: | YU Long-fa FENG Yong-jian |
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| Affiliation: | YU Long-fa,FENG Yong-jian(Mechanical and Electrical Engineering,Xiamen University,Xiamen 361005,China) |
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| Abstract: | In this paper,Micro vacuum sensor production process is introduced.Methods and characteristics of cleaning,oxidation,lithography,etching,diffusion and bonding processes are elaborated.The questions in the production process are analyzed and the solutions are proposed.At last,production process is summarized. |
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| Keywords: | lithography corrosion diffusion bonding |
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