流体储运装备真空测量装置设计与试验验证

目的 对新型流体储运装备真空测量装置的设计和试验进行系统研究,解决传统装置存在的量程不足、残留气体内漏等问题,验证装置漏率在环境试验中的变化,同时开展批量安装及真空测量应用。方法 运用FEM对新型真空测量装置的受力进行分析;采用氦质谱仪泄漏检测技术对环境试验前后的新型真空测量装置以及传统样品的漏率进行对比测试。结果 新型真空测量装置的初始漏率达到10-10Pa·m3/s;经过环境试验后新型真空测量装置的漏率未发生明显变化,传统装置的漏率在环境试验后明显上升。结论 新型真空测量装置所采用的热电偶&热阴极复合真空规,实现了流体储运装备夹层的真空度全量程测量,并满足易燃介质储运过程中的电气防爆要求。所增加的补抽真空结构可以有效防止真空测量装置的残留气体内漏。所采用的“CF法兰+无氧铜”密封结构具有很好环境适应性和较低的真空泄漏风险,同时也首次通过试验验证了真空测量装置的漏率在环境试验过程中的变化。

Design and Test Verification of Vacuum Measuring Device for Fluid Storage & Transportation Equipment

The work aims to systematically study the design and experiment of a new vacuum measuring device for fluid storage & transportation equipment, to solve the problems existing in the traditional devices, such as insufficient range and residual gas leakage, verify the change of the leakage rate of the device in the environmental test, and carry out batch installation and vacuum measurement application. The FEM was used to analyze the force of the new vacuum measuring device; the leakage rate of the new vacuum measuring device and the traditional sample before and after environmental test was compared by helium mass spectrometry. The results indicated that initial leakage rate of the new vacuum measuring device reached 10-10 Pa.m3/s. After environmental test, the leakage rate of the new vacuum measuring device did not change obviously, while the leakage rate of traditional device increased obviously after the environmental test. Thermocouple & thermocathode composite vacuum gauge used in the new vacuum measuring device can realize the full range of interlayer vacuum measurement of fluid storage & transportation equipment, and satisfy the electrical explosion-proof requirements of flammable medium storage & transportation. The supplementary vacuum pumping structure can solve the problem of residual gas leakage in vacuum measuring device. The "CF flange + oxygen-free copper" sealing structure demonstrates superior environmental adaptability and low vacuum leakage risk. At the same time, the change of leakage rate of vacuum measuring devices in the process of environmental test is also verified for the first time.