Modulation periods and ratios induced changes of microstructure and mechanical properties of AlN/ZrB2 multilayered coatings |
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Authors: | D.J. Li H. Wang Y.B. Kang L. Dong G.Q. Liu J. Gong Y.D. Sun X.Y. Deng |
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Affiliation: | College of Physics and Electronic Information Science, Tianjin Normal University, Tianjin 300387, China |
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Abstract: | AlN/ZrB2 multilayered coatings were synthesized in a magnetron sputtering system. The extensive measurements were employed to investigate the influence of different nanoscale modulation periods and modulation ratios on microstructure and mechanical properties of the coatings. Analysis of X-ray diffraction, profiler and nanoindention indicated that multilayered coatings possessed much higher hardness and elastic modulus than monolithic AlN and ZrB2 coatings. At the substrate negative bias of −80 V, maximum hardness (34.1 GPa) and elastic modulus (469.8 GPa) were obtained in the multilayer with Λ = 30 nm and tAlN:tZrB2 = 1:3. This hardest multilayer showed a marked polycrystalline structure with the strong mixture of ZrB2 (001), ZrB2 (100), ZrB2 (101), AlN (100) textures. |
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Keywords: | Magnetron sputtering AlN/ZrB2 multilayered coatings Modulation period Modulation ratio |
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