Effects of Mg doping on structural, optical, and electrical properties of CuScO2(0001) epitaxial films

CuScO₂ thin films with different Mg concentrations were grown on a-plane sapphire substrates by combining the two-step deposition and post-annealing techniques using Cu₂(Sc_1−xMg_x)₂O_y X = 0.01, 0.05, 0.10] targets. The effects of the Mg doping in the Sc-site on the structural, optical, and electrical properties of the films were investigated. A Mg-doped CuScO₂3R](0001) epitaxial film was obtained at a Mg concentration of 1 at%. The slight increase in the a-axis lattice constant and the slight decrease in the c-axis lattice constant of the film were confirmed using two-dimensional X-ray reciprocal space mapping. No significant increase in optical absorption was observed in the film, and the energy gap for direct allowed transition was estimated at 3.7 eV. The film showed an increase in the electrical conductivity and carrier concentration and a decrease in the Hall mobility compared with those of the non-doped epitaxial film. The decrease in the overlap of Cu 3d orbitals due to the increase in the a-axis lattice constant is one cause of the decrease in the Hall mobility of the film. The temperature dependence of the electrical transport properties of the film exhibited semiconducting characteristics, and the activation energy estimated from the temperature dependence of the carrier concentration was 0.55 eV.