国外微细加工技术最新文献索引 |
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引用本文: | 吴健昌
,许春高
,吴明华.国外微细加工技术最新文献索引[J].微细加工技术,1992(3). |
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作者姓名: | 吴健昌 许春高 吴明华 |
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摘 要: | (为便于读者查阅,现将本索引中采用的期刊名称缩写和全名对照列在下面)A.P.L. Applied Physics Letters。J.J.A.P. Japanese Journal of Applied PhysicsJ.V.S.T. Journal of Vacuum Science&TechnologyM.M。T. Microelectronics Manufacturing TechnologyN.I.M.P.R. Nuclear Instruments and Methods in Physics ResearchS.S.T. Solid State Techno~IgYS.I, Semiconductor InternationalS.W. Semiconductor WorldSPIE Society of Photo—Optical Instrumentation Engineers92—100 用高能离子注入制作16M DRAM…
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