| Abstract: | Calculation of the (420)-reflection profile of a γ′-Fe4N1?x layer with columnar structure and strain relaxation A couple of surface treatments and thin film deposition methods lead to strained layers and columnar layer structure. Within the columns strain relaxation outwards along the column radius occurs. This relaxation causes asymmetrical broadening of X-ray reflections. A method is introduced, to calculate the reflection profiles of layers with columnar structure and strain relaxation. The possibility of a comparison between a calculated and a measured profile for the determination of the average column radius and the relaxation is discussed. |
