一种用于微谐振器频率调节的静电梳齿结构设计

针对微梳齿谐振器频率偏移的问题,提出了一种用于微谐振器频率调节的曲线形状静电梳齿结构。通过对梳齿简单模型的静电力分析,得出其静电力-位移特性,其斜率就是静电弹性系数;然后从谐振频率出发,分析了影响谐振频率的因素。研究结果表明,对于梳齿式微谐振器,当调谐电压从0 V变化到80 V左右时,器件的有效弹性系数从2.64 N/m减小到1.23 N/m左右,且谐振频率从自然谐振频率18.9 kHz减小到13 kHz,降幅分别为53%和31%。实验结果表明,这种曲线梳齿"软化"了静电微谐振器或者微驱动器的系统弹性,能够有效地调节谐振频率。

Design of electrostatic comb actuator for frequency tuning of micro resonator

Aiming at the frequency offset of comb micro resonator,a curved-shaped electrostatic comb structure was posed for frequency tun-ing of micro resonator.Electrostatic force-engagement response was derived from a simple comb finger model and the slope of the response was electrostatic stiffness.The inftuences on tuning resonant frequency was analyzed.The results indicate that,for comb micro resonators,when tuning voltage is changed from 0 V to 80 V,effective stiffness of the device is decreased from 2.64 N/m to 1.23 N/m and the resonant frequency is decreased from natural frequency（18.9 kHz） to 13 kHz,dropping 53% and 31% respectively.The results indicate that the presented curve comb can soften the stiffness of electrostatic resonator or micro actuator so as to tune resonant frequency effectively.