Rugate filter made with composite thin films by ion-beam sputtering |
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Authors: | Lee Cheng-Chung Tang Chien-Jen Wu Jean-Yee |
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Affiliation: | Thin Film Technology Center and Institute of Optical Sciences, National Central University, Chung-Li 32001, Taiwan, China. cclee@ios.ncu.edu.tw |
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Abstract: | Composite films of Ta-Si oxide with refractive indices that varied from 1.48 to 2.15 were realized by using rf ion-beam sputtering. All the composite films were amorphous and had a surface roughness of less than 0.3 nm. The inhomogeneity of the composite was discussed, and a rugate filter was designed and fabricated by automatic computer control. |
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