| 高衍射效率全息光栅的制作与复制工艺研究 |
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| 引用本文： | 臧甲鹏,王朝阳.高衍射效率全息光栅的制作与复制工艺研究[J].现代科学仪器,1999(5):46-48. |
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| 作者姓名： | 臧甲鹏 王朝阳 |
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| 作者单位： | 北京市计量科学研究所!100029(臧甲鹏)，清华大学光测力学研究室!100081(王朝阳) |
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| 摘 要： | 本文根据正性光致抗蚀的感光显影特性，推导出了全息光栅沟槽深度公式，分析了影响光栅糟型结构的因素，建立了光栅沟槽模型。并根据论理论制作出了衍射效率高达６５％的 ２４００线／毫米的全息平面反射光栅。本文还介绍了全息光栅复制技术，解决了高质量光栅昂贵的生产成本和大批量生产问题。
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| 关 键 词： | 正性光致抗蚀剂 光栅沟槽 衍射效率 光栅复制 |
The Fabrication and Replication of Holographic Grating with High Diffraction Efficiency |
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| Zang Jiapeng,Wang Chaoyang.The Fabrication and Replication of Holographic Grating with High Diffraction Efficiency[J].Modern Scientific Instruments,1999(5):46-48. |
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| Authors: | Zang Jiapeng Wang Chaoyang |
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| Affiliation: | Zang Jiapeng;Wang Chaoyang (Beijing Metrological Science Institute 100029) (Tsinghua University 100081 ) |
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| Abstract: | In this paper a groove-depth formula of holographic grating is derived according to the exposure and development characteristics of positive photoresist, then the typical shapes of groove are discussed. Using this theory a 2400lines/mm reflecting plane holographic grating, whose diffraction efficiency in the UV region is about 65% was fabricated, and the replica of some holographic gratings, is made by the replication technology of grating. |
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| Keywords: | Positive photoresist Groove profile of grating diffraction efficiency Replication of grating |
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