扩散热处理对316L不锈钢表面钯／铁薄膜形貌和相组成的影响

采用真空电弧离子镀工艺，在316L不锈钢表面沉积钯，铁（Pd／Fe）合金薄膜并进行真空扩散热处理，观察扩散热处理工艺对Pd／Fe薄膜的形貌和相组成的影响。结果表明：采用真空电弧离子镀工艺，可在316L不锈钢表面沉积均匀的Pd／Fe膜；扩散热处理工艺对Pd／Fe膜的形貌和相组成有显著影响。经900℃保温1h处理后，Pd膜与Fe膜间互扩散形成一定量的Pd-Fe合金相；随着热处理温度升高，Pd,Fe膜层向316L基体扩散的距离增大，同时基体中的Cr，Ni向外扩散的量也增多。

Effects of Diffuse Heat Treatments on Morphology and Phase Constitution of Palladium/Ferrum Film on the Surface of 316L Stainless Steel

Palladium/ferrum(Pd/Fe)film was deposited on the surface of 316L stainless steel by vacuum arc deposition technique followed by vacuum heat treatment.Effects of vacuum heat treatments on the morphology and phase constitution of Pd/Fe films were investigated.The results show that Even Pd/Fe film can be deposited on the surface of 316L stainless steel by vacuum arc deposition,and the diffuse heat treatment techniques have significant effects on the morphology and phase constitution of Pd/Fe film.Certain Pd-Fe alloy phase was formed through interdiffusion between Pd film and Fe film after treatment by 900 degrees centigrade for one hour.Along with the temperature increment of the diffuse heat treatment,the diffusion distance of Pd and Fe film into the 316L matrix increase,where as amount of chromium and nickel of the matrix diffused outwards to the films also increase.