压电陶瓷定位系统电容传感器容错控制

针对压电陶瓷定位系统中电容传感器故障对定位精度的影响,对使用扩展卡尔曼滤波(EKF)进行容错控制的方法进行了研究。以传感器采样电路故障和掉电故障为对象,对三阶轨迹规划算法下电容传感器的EKF滤波公式进行了分析,提出以离散化迭代计算的EKF代替传统的将非线性系统线性化的方法。在压电陶瓷定位系统实验平台上,使用激光干涉仪作为测量基准,在传感器采样电路故障和掉电故障的情况下,实现了500μm行程,绝对精度小于3.5μm,误差小于0.7%的定位控制。结果表明,基于EKF的电容传感器容错控制可以有效减小传感器故障引起的控制误差,增加压电陶瓷定位系统的鲁棒性。

Fault tolerance control of capacitance transducer in piezoelectric ceramic positioning system

As the failure of capacitance transducer has a big impact on tracking accuracy of the piezoelectric ceramic positioning system,the methodology of using extended Kalman filter（EKF）to implement the fault tolerance control is investigated in this paper. Aiming at the sampling circuit failure and the power failure of the transducer,an EKF filtering formula of capacitance transducer under three-order trajectory planning algorithm is analysed. The method that the discrete iterative EKF algorithm is taken to replace the traditional method is introduced. Positioning control experiment is performed with the benchmark of the laser interferometer. The results indicate that the proposed method can achieve 0.7% maximum tracking errors,with the deviation of ±3.5 μm,in a stroke of 500 μm. The experimental results indicate that the fault tolerance control method based on EKF can the control error caused by transducer fault and increase the robustness of the piezoelectric ceramic positioning system.