Experimental characterization of electrostatically actuated in-plane bending of microcantilevers |
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Authors: | A Ballestra E Brusa M Gh Munteanu A Somà |
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Affiliation: | (1) Laboratory of Microsystems, Department of Mechanics, Politecnico di Torino, C.so Duca degli Abruzzi, 24, 10129 Torino, Italy;(2) Laboratory “Tech-UP” (Ubiquita and Pervasive Technologies), Department of Electrical, Management and Mechanical Engineering, University of Udine, via delle Scienze, 208, 33100 Udine, Italy |
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Abstract: | Experimental validation of numerical models developed by the authors to predict the static behaviour of microelectrostatic
actuators is described. Cantilever microbeams, currently used in connection with RF-MEMS and micro-scale material testing
were analysed. A set of microcantilevers, bending in the plane of the wafer, i.e. in the same plane as the profiling system’s
target, was tested. This differs from the popular case of out-of-plane microbeams, usually studied in the literature. Geometry
nonlinearity caused by large deflection of the microbeam was investigated and nonlinear coupled formulation of electromechanical
equilibrium was performed. Coupled-field analysis was implemented using the Finite Element Method (FEM), to predict displacements
and pull-in voltage measured by Fogale Zoomsurf 3D, subsequently plotting the displacement-versus-voltage curve to complete
model validation. FEM nonlinear analysis, based on iterative approach with mesh morphing, and FEM non-incremental approach,
including a special element proposed by the authors, are compared to the linear solution and to experimental results. Geometry
nonlinearity appears relevant in microbeam modelling and requires a nonlinear solution of the coupled problem. Investigative
work, which compared the results of 2D and 3D models to experimental data, revealed that some three dimensional effects are
significant in model validation, but the 2D approach may be effective in predicting static behaviour provided that at least
a microbeam thickness equivalent is adopted. |
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