Optical properties of titanium oxide films obtained by cathodic arc plasma deposition |
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| Authors: | Vukoman JOKANOVI Boana OLOVI Anka TRAJKOVSKA PETKOSKA Ana MRAKOVI Bojan JOKANOVI Milo NENADOVI Manuela FERRARA Ilija NASOV |
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| Affiliation: | 1. Vin(c)a Institute of Nuclear Sciences, University of Belgrade, Mike Petrovi(c)a Alasa 12-14, 11001 Belgrade,Serbia;ALBOS Doo, Orahova(c)ka 19, 11000 Belgrade, Serbia;2. Vin(c)a Institute of Nuclear Sciences, University of Belgrade, Mike Petrovi(c)a Alasa 12-14, 11001 Belgrade,Serbia;3. University St Kliment Ohridski, Faculty of Technology and Technical Sciences, Veles, R.Macedonia;4. GL group, Werner-von-Siemens-Straβe, 86405 Metingen, Germany;5. TE-STT-SCIS, Laboratorio Sviluppo Componenti ed Impianti Solari, Piazzale Enrico Fermi 1, 80055 Portici(NA), Italia;6. Plasma Doo, 29 November 66/9, 1000 Skopje, R.Macedonia |
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| Abstract: | Structural and optical properties of nanometric titanium oxide (TixOy) films obtained by cathodic arc plasma deposition were investigated.Phase analysis by x-ray diffraction and Fourier-transform infrared spectroscopy showed the presence of anatase,rutile,Ti2O3,Ti4O7 and amorphous phases.Scanning electron microscopy images showed well-developed surface morphology with nano-patterns.Spectroscopic ellipsometry revealed film thicknesses of 53 and 50 nm,variable refractive indices dependent on the light wavelength and close to zero extinction coefficients for wavelengths higher than 500 nm.On the basis of ultraviolet-visible spectroscopy data and using the Tauc equation,band gap values for direct and indirect electron transitions were determined. |
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| Keywords: | optical materials plasma deposition thin films ellipsometry |
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