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Magnetic Field Improvement in End Region of Rectangular Planar DC Magnetron Based on Particle Simulation |
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| Affiliation: | [1]Department of Electrical Engineering, Xi'an Jiaotong University, Xi'an 710049, China; [2]pennsylvania Pittsburgh Glass Industries Inc. Glass R&D Center, Pittsburgh, Pennsylvania, 15238, USA |
| Abstract: | magnetron sputtering, plasma, magnetic field, erosion, particle simulation |
| Keywords: | magnetron sputtering plasma magnetic field erosion particle simulation |
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