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Simulation to Predict Target Erosion of Planar DC Magnetron |
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| Affiliation: | [1]Xi'an Jiaotong University, Xi'an 710049, China; [2]PPG Glass R&D Center, Pittsburgh, Pennsylvania 15238, USA |
| Abstract: | magnetron sputtering, discharge, plasma, erosion, particle simulation |
| Keywords: | magnetron sputtering discharge plasma erosion particle simulation |
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