|
|||||
|
|
The effect of unbalanced coefficient of magnetron on the structure and properties of CN |
|
| Authors: | Xiaobin Wen Xian Li Tao Wang Bailing Jiang |
| Affiliation: | WEN Xiaobin,LI Xian,WANG Tao,JIANG Bailing (School of Material Science and Engineering,Xi'an University of Technology,Xi'an 710048,China) |
| Abstract: | The effect of unbalanced coefficient of magnetron (UCM) on the structure and tribological properties of CrNx hard coatings was studied.The CrNx coatings were deposited on both Si wafer and hardened tool steel substrates using a closed-field unbalanced magnetron sputtering ion plating technique in a gas mixture of Ar+N2 under different unbalanced magnetron conditions.The coatings were characterized by means of XRD,XPS,SEM,microhardness tester and pin-on-disc tribometer to study respectively their structure,c... |
| Keywords: | magnetron sputtering unbalanced coefficient CrNx coating structure properties |
| 本文献已被 CNKI SpringerLink 等数据库收录！ | |