| 超高真空大截面差分系统的设计 |
| |
| 引用本文： | 薛松,关志远. 超高真空大截面差分系统的设计[J]. 光学精密工程, 1991, 0(3): 18-23 |
| |
| 作者姓名： | 薛松 关志远 |
| |
| 摘 要： | 本文提出了超高真空大截面差分系统的分析计算方法,并对北京正负电子对撞机同步辐射X射线光刻光束线的差分抽气系统进行了计算与设计。
|
Design of the UHV Large Cross Section Differential Pumping System |
| |
| Xue Song,Guan Zhiyuan. Design of the UHV Large Cross Section Differential Pumping System[J]. Optics and Precision Engineering, 1991, 0(3): 18-23 |
| |
| Authors: | Xue Song Guan Zhiyuan |
| |
| Abstract: | This paper presents a method of analysis and calculation for the UHV large section differential pumping system. A differential pumping system for the SR X-ray lithography beamline of BEPC (Beijing Electron Positron Collider) is calculated and designed. |
| |
| Keywords: | |
| 本文献已被 CNKI 等数据库收录！ |
| 点击此处可从《光学精密工程》浏览原始摘要信息 |
|
点击此处可从《光学精密工程》下载全文 |
|
