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Recent advances with the scanning proton microprobe
引用本文:G. L. Allan,G. J. F. Legge,J. C. McCallum,C. D. McKenzie,J. Camakaris. Recent advances with the scanning proton microprobe[J]. 核技术, 1986, 0(4)
作者姓名:G. L. Allan  G. J. F. Legge  J. C. McCallum  C. D. McKenzie  J. Camakaris
作者单位:University of Melbourne,Australia,University of Melbourne,Australia,University of Melbourne,Australia,University of Melbourne,Australia,University of Melbourne,Australia
基金项目:Shanghai Institute of Nuclear Research,Shanghai,China.
摘    要:The scanning proton microprobe has established itself as an essential tool for quantitative and trace elemental microscopical analysis and for nondestructive depth profiling, This paper discusses the major strengths and limitations of the instrument, the advances that have been made and the directions in which instrumental research is progressing to enable further improvements in probe performance. Recent applications in medical and in semi-conductor research are presented in order to illustrate the significance of these improvements.


Recent advances with the scanning proton microprobe
Zhu Jieqing G. L. Allan G. J. F. LeggeJ. C. McCallum C. D. McKenzie J. Camakaris. Recent advances with the scanning proton microprobe[J]. Nuclear Techniques, 1986, 0(4)
Authors:Zhu Jieqing G. L. Allan G. J. F. LeggeJ. C. McCallum C. D. McKenzie J. Camakaris
Abstract:The scanning proton microprobe has established itself as an essential tool for quantitative and trace elemental microscopical analysis and for nondestructive depth profiling, This paper discusses the major strengths and limitations of the instrument, the advances that have been made and the directions in which instrumental research is progressing to enable further improvements in probe performance. Recent applications in medical and in semi-conductor research are presented in order to illustrate the significance of these improvements.
Keywords:scanning proton microprobe high brightness ion sourcethree dimensional (3D) contour maps channeling contrast microscopy
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