集成高性能嵌入式螺管电感和互感技术

采用微加工技术制造了可与集成电路工艺后端集成的嵌入式螺管型电感和互感器件。实现的器件具有悬空结构，大大抑制了衬底损耗。同时，器件结构嵌入硅衬底表面，与标准集成电路封装兼容。测试表明电感器件达到高的品质因数和自谐振频率，互感器件实现很宽频率范围内的高有效增益。力学性能分析和测试表明器件具有良好的抗冲击能力和热稳定性。所实现的电感和互感适合高性能射频集成电路(Radio-frequency integrated circuits, RFIC)的应用。

On-chip Microfabricated High-performance Embedded Solenoid-inductors and Transformers

Concave solenoid inductors and transformers are fabricated with a post-CMOS microfabrication process.The fabricated devices are air suspending which depresses substrate effects.The concave embedding device structures are compatible with standard integrated circuit packaging.The inductors have achieved both high qulity-factor and self-resonant frequency.The transformers have achieved high available gain within a broad frequency range.Experiments and analysis have proved reliability and stability under enviro...