Effects of PbTiO3 seeding layer on electrical properties of PbZr0.4Ti0.6O3 thin films |
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Affiliation: | 1. School of Materials Science and Engineering, Yeungnam University, Gyeongsan 712-749, Republic of Korea;2. School of Materials Science and Engineering, Kyungpook National University, Daegu 702-701, Republic of Korea |
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Abstract: | Improvements in the ferroelectric properties were obtained by controlling process parameters of the lead titanate (PTO) seed layer. Highly oriented (1 1 1) perovskite lead zirconate titanate (PZT) films yielded the largest polarization switching charges, with an improved retention behavior, compared to those of PZT films without a PbTiO3 seed layer. The degree of (1 1 1) orientation in a PZT perovskite film increased, when an additional heat treatment process was not applied during formation of the PTO seed layer. In addition, PTO seed layers showed the best results when 8% excess Pb was supplied. |
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