Electrostatically actuated dip pen nanolithography probe arrays |
| |
| Affiliation: | 1. Friedrich-Alexander University Erlangen-Nuremberg, Institute for Material Science, Chair of Metals Science and Technology, Martensstraße 5, 91058 Erlangen, Germany;2. Technical University Dresden, Institute of Material Science, Chair of Inorganic Non-Metallic Materials, 01062 Dresden, Germany;3. Fraunhofer IKTS, Winterbergstraße 28, 01277 Dresden, Germany;1. INSERM U1148, Laboratory for Vascular Translational Science (LVTS), Institut Galilée, Université Paris 13, Sorbonne Paris Cité, 99 Avenue Jean-Baptiste Clément, Villetaneuse, F-93430, France;2. Inserm U1148, Laboratory for Vascular Translational Science, UFR SMBH, Université Paris 13, Sorbonne Paris Cité, Groupe Biothérapies et Glycoconjugués, Bobigny, F-93430, France;1. School of Materials Science and Engineering, University of Shanghai for Science and Technology, 200093 Shanghai, China;2. Key Laboratory for Ultrafine Materials of Ministry of Education, School of Materials Science and Engineering, East China University of Science and Technology, Shanghai 200237, China;3. Sinosteel Zhengzhou Research Institute of Steel Wire, 450001 Zhengzhou, China;4. Analytical Research, Wilhelm Kress Platz 29/58/7, 1110 Wien, Austria;1. IJPB, UMR1318 Inra/AgroParisTech, Inra, Route de Saint-Cyr, 78026 Versailles Cedex, France;2. ICMPE, UMR7182, Equipe ESO, 2-8 rue Henri Dunant, 94320 Thiais, France |
| |
| Abstract: | Dip pen nanolithography (DPN) is a method of creating nanoscale chemical patterns on surfaces using an atomic force microscope (AFM) probe. Until now, efforts to increase the process throughput have focused on passive multi-probe arrays and active arrays based on thermal bimetallic actuation. This paper describes the first use of electrostatic actuation to create an active DPN probe array. Electrostatic actuation offers the benefit of actuation without the probe heating required for thermal bimetallic actuation. Actuator cross talk between neighboring probes is also reduced, permitting more densely spaced probe arrays. The array presented here consists of 10 cantilever probes, where each is 120 μm long and 20 μm wide. Each cantilever probe is actuated by the electrostatic force between the probe and a built-in counter electrode with a 20–25 μm gap. The tip-to-tip probe spacing, also called the array pitch, is 30 μm. Patterns of 1-octadecanethiol were created on gold surfaces to demonstrate single-probe actuation, simultaneous multi-probe actuation, and overlap of patterns from adjacent probes. The minimum line width was 25 nm with an average line width of 30–40 nm. |
| |
| Keywords: | |
| 本文献已被 ScienceDirect 等数据库收录！ |
|
