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Influence of processing and conduction materials on properties of co-fired resistors in LTCC structures
Affiliation:1. Robert Bosch GmbH, Reutlingen 72762, Germany;2. Department of Microsystems Engineering, IMTEK, University of Freiburg, Freiburg 79110, Germany
Abstract:The motivation of this study is the need for fundamental understanding of the effects of processing conditions on the electrical properties of low-temperature co-fired ceramic (LTCC) tapes, those screen printed with commercial thick-film pastes of electronic components for increased reliability. The method of the study is realized by analyzing the physical and chemical effects of mono/multilayer firing and firing temperatures on the temperature coefficient of resistance (TCR) and sheet resistance (SR) values of the positive temperature coefficient (PTC) resistors screen-printed on LTCC tapes. The results are discussed with respect to the information obtained by the scanning electron microscopy (SEM), electro dispersive X-ray analysis (EDXS), X-ray and dilatometry analysis. It is shown that the content of pastes combined with varying processing conditions result in deviation from expected TCR and SR values due to the chemical and/or mechanical reactions.
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