Modeling microwave behaviors of series cantilever MEMS switch

Simple and effective model is demanded which enables the design and structural optimization of the microwave MEMS switch efficiently. For this purpose the microwave behaviors of series metal cantilever MEMS switch have been modeled by “simple” circuit in this paper. The microwave characteristics have been calculated and compared with the experiment data based on the developed model. The results show that the microwave characteristics of series metal cantilever MEMS switch can be described very well with this model. Based on this model, the influences of the structural parameters of the switch on the microwave characteristics have been discussed extensively.